Semiconductor Vacuum Pump
In the process of manufacturing integrated circuits, flat-panel displays, and optoelectronic devices, since semiconductor materials need to be processed at high temperatures and undergo multiple film depositions, a vacuum pump is required to maintain the corresponding laboratory conditions.The use of high-performance hot isostatically pressed silicon nitride ceramic balls and specially processed higher precision raceways in vacuum pumps enables the bearings to have amazing performance in terms of high temperature, high speed, low vibration, high pollution, insufficient lubrication, high reliability and long life.Silicon nitride vacuum pump bearings can operate continuously for more than 30,000 hours when DmN < 500,000.
