porous alumina ceramic suction cups

Alumina ceramic vacuum chucks, as core components of semiconductor equipment, have the following technical characteristics and application scenarios:

Product Types and Technical Characteristics

1. Porous Ceramic Vacuum Chucks: Made from materials such as alumina or silicon carbide, with a porosity of 30%-50% and pore sizes in the micron range, achieving uniform suction force and permeability. They possess high flatness, wear resistance, and chemical stability, reducing wafer surface scratches and particle contamination.

2. Typical Applications: Wafer thinning, cutting, grinding, and other processes, suitable for 2-12 inch wafers and non-standard customized requirements.

Application Scenarios in Semiconductor Manufacturing

1. Front-end Processes:

Lithography machines: Used as mobile platform components, working with electrostatic chucks to achieve nanometer-level positioning accuracy.

Etching machines: Used in chambers, gas distribution plates, etc., to withstand plasma etching environments.

2. Back-end Packaging:

Solving the challenge of handling ultra-thin wafers and avoiding micro-crack contamination caused by mechanical clamping.

Supports custom specifications.